Development of Laser-Produced Plasma X-Ray Source.

Brilliance Improvement of a Laser-Produced Soft X-Ray Plasma

The brilliance of a laser-produced soft X-ray source is enhanced for gaseous target concepts. In contrast to solid or liquid target materials, these sources are clean and versatile but provide a comparably low conversion efficiency of laser energy into EUV and soft X-ray radiation. The basic idea is to induce supersonic effects in the gas jet, leading to a local increase of the particle density...

Picosecond soft x ray source from subpicosecond laser produced plasmas

Short pulse high intensity laser plasma interactions are investigated experimentally with temporally and spectrally resolved soft x ray diagnostics We demonstrate that the pulse width of the laser produced x rays emitted from solid targets may be varied down to the picosecond time scale by adjusting the incident laser ux Bright picosecond broadband emission characteristic of a short scale lengt...

X-ray Emission Spectra from Laser-produced Cobalt Plasma

Development of a time-resolved soft x-ray spectrometer for laser produced plasma experiments.

A 2400 lines/mm variable-spaced grating spectrometer has been used to measure soft x-ray emission (8-22 Å) from laser-produced plasma experiments at Lawrence Livermore National Laboratory's Compact Multipulse Terrawatt (COMET) Laser Facility. The spectrometer was coupled to a Kentech x-ray streak camera to study the temporal evolution of soft x rays emitted from the back of the Mylar and the co...

Droplet-target laser-plasma source for proximity x-ray lithography

A compact, high-brightness and practically debris-free laser-plasma soft x-ray source for proximity x-ray lithography is described. The target of the source is small liquid fluorocarbon droplets injected into vacuum with a piezoelectrically vibrated nozzle. Emission from heliumand hydrogenlike fluorine in the 1.2–1.7 nm wavelength range was determined to ;2310 photons/~sr-pulse!, which correspo...